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Yerekana karuseli ya sisitemu eshatu icyarimwe.Koresha Utubuto na Ibikurikira kugirango unyuze mumashusho atatu icyarimwe, cyangwa ukoreshe utubuto twa slide kumpera kugirango wimuke unyuze mubice bitatu icyarimwe.
Kwivanga kwa lazeri itaziguye (DLIP) ihujwe na laser-iterwa nigihe cyimiterere yubuso (LIPSS) ituma habaho imiterere yimikorere yibikoresho bitandukanye.Ibicuruzwa byinjira mubisanzwe byiyongera mukoresheje impuzandengo yo hejuru ya laser.Nyamara, ibi biganisha ku kwegeranya ubushyuhe, bigira ingaruka ku bubi n'imiterere y'ubuso bwaturutse.Niyo mpamvu, birakenewe kwiga muburyo burambuye ingaruka zubushyuhe bwa substrate kuri morphologie yibintu byahimbwe.Muri ubu bushakashatsi, hejuru yicyuma cyashushanyaga umurongo na ps-DLIP kuri 532 nm.Kugira ngo hakorwe iperereza ku ngaruka z'ubushyuhe bwa substrate kuri topografiya yavuyemo, isahani yo gushyushya yakoreshejwe mu kugenzura ubushyuhe.Gushyushya kugeza kuri 250 \ (^ {\ umuzenguruko} \) С byatumye igabanuka rikabije ryimbitse zubatswe kuva kuri 2.33 kugeza 1.06 µm.Kugabanuka byajyanye no kugaragara kwubwoko butandukanye bwa LIPSS bitewe nicyerekezo cyibinyampeke bya substrate hamwe na okiside yubutaka bwa laser.Ubu bushakashatsi bwerekana ingaruka zikomeye zubushyuhe bwa substrate, nabwo buteganijwe mugihe ubuvuzi bwo hejuru bukozwe murwego rwo hejuru rwa laser imbaraga kugirango habeho ingaruka zo gukusanya ubushyuhe.
Uburyo bwo kuvura isura bushingiye kuri ultrashort pulse laser irrasiyoya iri kumwanya wambere mubumenyi ninganda bitewe nubushobozi bwabo bwo kuzamura imitungo yibikoresho byingenzi1.By'umwihariko, laser-iterwa na progaramu yubuso bwimikorere nuburyo bugezweho murwego rwinganda ninganda zikoreshwa1,2,3.Kurugero, Vercillo n'abandi.Ibirwanya anti-icing byerekanwe kuri titanium alloys ikoreshwa mu kirere hashingiwe kuri laser-iterwa na superhydrophobicity.Epperlein et al yatangaje ko ibintu bya nanosize byakozwe nuburinganire bwa laser bishobora kugira ingaruka kumikurire ya biofilm cyangwa kubuza urugero rwicyuma5.Byongeye kandi, Guai n'abandi.yanateje imbere optique ya selile izuba.6 Rero, imiterere ya lazeri ituma habaho umusaruro wibisubizo bihanitse byuburyo bugenzurwa no gukuraho ibintu byo hejuru1.
Tekinike ikwiye ya tekinoroji yo kubyara ibintu byubuso burigihe ni lazeri itaziguye (DLIP).DLIP ishingiye kubuso hafi yubuso bwibice bibiri cyangwa byinshi bya laser kugirango bigire isura ishushanyije hamwe nibiranga micrometero na nanometero.Ukurikije umubare hamwe na polarisiyasi yibiti bya laser, DLIP irashobora gushushanya no gukora ibintu byinshi bitandukanye byubutaka.Uburyo butanga icyizere ni uguhuza imiterere ya DLIP hamwe na laser-iterwa nigihe cyububiko bwubutaka (LIPSS) kugirango habeho imiterere yubutaka hamwe nuburyo bukomeye bwubatswe8,9,10,11,12.Muri kamere, izi nzego zerekanwe gutanga imikorere myiza kuruta icyitegererezo kimwe13.
Imikorere ya LIPSS igengwa nigikorwa cyo kwiyongerera imbaraga (ibitekerezo byiza) bishingiye ku kwiyongera hafi yubuso bwoguhindura imishwarara ikwirakwizwa.Ibi biterwa no kwiyongera kwa nanoroughness kuko umubare wa laser pulses ikoreshwa wiyongera 14, 15, 16. Guhindura bibaho ahanini biterwa no kwivanga kwumuraba wasohotse numurima wa electromagnetic15,17,18,19,20,21 byavunitse kandi ibice bitatanye cyangwa ibice byo hejuru.Imiterere ya LIPSS nayo igira ingaruka kumwanya wa pulses 22,23.By'umwihariko, impuzandengo yo hejuru ya laser ningirakamaro muburyo bwo kuvura umusaruro mwinshi.Ibi mubisanzwe bisaba gukoresha igipimo cyo gusubiramo cyane, ni ukuvuga murwego rwa MHz.Kubera iyo mpamvu, intera iri hagati ya laser pulses ni ngufi, biganisha ku ngaruka zo gukusanya ubushyuhe 23, 24, 25, 26. Izi ngaruka zitera kwiyongera muri rusange ubushyuhe bwubuso, bushobora kugira ingaruka zikomeye kuburyo bwo gushushanya mugihe cyo gukuraho lazeri.
Mubikorwa byabanjirije iki, Rudenko n'abandi.na Tzibidis n'abandi.Uburyo bwo gushiraho imiterere ya convective bwaganiriweho, bugomba kurushaho kuba ingirakamaro kuko gukusanya ubushyuhe byiyongera 19.27.Byongeye, Bauer n'abandi.Huza ubwinshi bwikwirakwizwa ryubushyuhe hamwe na micron yubuso.Nuburyo iyi mikorere iterwa nubushyuhe bwo gushiraho, muri rusange abantu bemeza ko umusaruro wibikorwa ushobora kunozwa gusa nukongera igipimo cyo gusubiramo28.Nubwo ibi, nabyo, bidashobora kugerwaho hatabayeho kwiyongera cyane mububiko.Kubwibyo, ingamba zo gutunganya zitanga topologiya nyinshi ntishobora kwerekanwa kubiciro byo gusubiramo bidahinduye imikorere yimikorere nuburyo 9,12.Ni muri urwo rwego, ni ngombwa cyane gukora ubushakashatsi ku buryo ubushyuhe bwa substrate bugira ingaruka ku mikorere ya DLIP, cyane cyane iyo ikora igishushanyo mbonera bitewe no gushinga icyarimwe LIPSS.
Icyari kigamijwe muri ubu bushakashatsi kwari ugusuzuma ingaruka zubushyuhe bwa substrate hejuru yubutaka bwavuyemo mugihe DLIP itunganya ibyuma bitagira umwanda ukoresheje ps pulses.Mugihe cyo gutunganya lazeri, ubushyuhe bwa sample substrate yazanwe kugera kuri 250 \ (^ \ umuzenguruko \) C ukoresheje isahani yo gushyushya.Imiterere yubuso yavuyemo yaranzwe no gukoresha microscopi ya conocal, scanning electron microscopi, hamwe na X-ray spectroscopie ikwirakwiza ingufu.
Mu ruhererekane rwambere rwubushakashatsi, insimburangingo yicyuma yatunganijwe hifashishijwe ibice bibiri bya DLIP iboneza hamwe nigihe cya 4.5 µm hamwe nubushyuhe bwa substrate ya \ (T _ {\ mathrm {s}} \) 21 \ (^ {\ umuzenguruko } \) C, nyuma yiswe "ubushuhe" hejuru.Muri iki kibazo, impiswi iruzuzanya \ (o _ {\ mathrm {p}} \) ni intera iri hagati yimisemburo ibiri nkigikorwa cyubunini.Iratandukanye kuva 99.0% (pulses 100 kumwanya) kugeza kuri 99.67% (300 pulses kumwanya).Muri byose, ingufu zingana zingana \ (\ Phi _ \ mathrm {p} \) = 0.5 J / cm \ (^ 2 \) (kubwa Gaussiya ihwanye nta nkomyi) hamwe ninshuro yo gusubiramo f = 200 kHz.Icyerekezo cya polarisiyasi ya lazeri irasa nigikorwa cyo kumeza yimbonerahamwe (Igishusho 1a)), igereranywa nicyerekezo cyumurongo wa geometrie wakozwe nuburyo bubiri bwo guhuza ibiti.Amashusho yerekana imiterere yabonetse ukoresheje scanning electron microscope (SEM) irerekanwa mumashusho.1a - c.Kugirango dushyigikire isesengura ryamashusho ya SEM mubijyanye na topografiya, impinduka za Fourier (FFTs, zerekanwe mumwijima) zakozwe kumiterere isuzumwa.Mubibazo byose, DLIP geometrie yavuyemo yagaragaye hamwe nigihe cya 4.5 µm.
Kubibazo \ (o _ {\ mathrm {p}} \) = 99.0% mukarere kijimye ka fig.1a, ijyanye numwanya wa interineti ntarengwa, umuntu arashobora kwitegereza ibinono birimo ibintu bito bisa.Basimburana hamwe na bande yaka itwikiriye nanoparticle isa na topografiya.Kuberako imiterere ibangikanye hagati ya ruhago isa nkaho itandukanijwe na polarisiyasi yumurambararo wa laser kandi ifite igihe cya \ (\ Lambda _ {\ mathrm {LSFL-I}} \) 418 \ (\ pm 65 \) nm, gato munsi yuburebure bwa laser \ (\ lambda \) (532 nm) irashobora kwitwa LIPSS hamwe numwanya muto (LSFL-I) 15,18.LSFL-I itanga icyitwa s-ubwoko bwa signal muri FFT, "s" ikwirakwiza 15,20.Kubwibyo, ikimenyetso ni perpendicular kubintu bikomeye byo hagati bihagaritse, nabyo bikabyara imiterere ya DLIP (\ (\ Lambda _ {\ mathrm {DLIP}} \) \ (\ hafi \) 4.5 µm).Ikimenyetso cyakozwe nuburyo bugaragara bwimiterere ya DLIP mumashusho ya FFT yitwa "ubwoko bwa DLIP".
SEM amashusho yuburyo bwububiko bwakozwe hakoreshejwe DLIP.Ubwinshi bwingufu zingana ni \ (\ Phi _ \ mathrm {p} \) = 0.5 J / cm \ (^ 2 \) (kubitagira urusaku bihwanye na Gaussiya) hamwe nigipimo cyo gusubiramo f = 200 kHz.Amashusho yerekana ubushyuhe bwubushyuhe, polarisiyasi hamwe.Urujya n'uruza rw'icyiciro rwaranzwe n'umwambi wirabura muri (a).Inet yumukara yerekana FFT ihuye yabonetse kuva 37.25 \ (\ inshuro \) 37.25 µm SEM ishusho (yerekanwe kugeza igihe umuyaga uhinduka \ (\ vec {k} \ cdot (2 \ pi) ^ {-1} \) = 200 nm).Ibipimo byimikorere byerekanwe kuri buri shusho.
Urebye neza ku gishushanyo 1, urashobora kubona ko uko \ (o _ {\ mathrm {p}} \) guhuzagurika byiyongera, ikimenyetso cya sigmoid cyibanze cyane kuri x-axis ya FFT.Ibisigaye bya LSFL-I bikunda kuba byinshi.Mubyongeyeho, ubukana bugereranije bwubwoko bwa s bwaragabanutse kandi ubukana bwikimenyetso cya DLIP bwiyongereye.Ibi biterwa no kurushaho kuvugwa imyobo hamwe no guhuzagurika.Na none, ikimenyetso cya x-axis hagati yubwoko s na centre bigomba kuva muburyo bufite icyerekezo kimwe na LSFL-I ariko hamwe nigihe kirekire (\ (\ Lambda _ \ mathrm {b} \) \ (\ hafi \) 1.4 ± 0.2 µm) nkuko bigaragara ku gishushanyo 1c).Kubwibyo, hafatwa ko imiterere yabyo ari urugero rwibyobo rwagati mu mwobo.Ikintu gishya nacyo kigaragara murwego rwo hejuru rwinshi (wavenumber nini) ya ordinate.Ikimenyetso kiva mu kangaratete kangana ku mwobo w’umwobo, bishoboka cyane ko biterwa no kwivanga kwibyabaye hamwe n’umucyo ugaragara imbere kumurambi9,14.Mubikurikira, izi mpanuka zerekanwa na LSFL \ (_ \ mathrm {edge} \), nibimenyetso byabo - kubwoko -s \ (_ {\ mathrm {p)) \).
Mu igeragezwa ryakurikiyeho, ubushyuhe bw'icyitegererezo bwazamuwe bugera kuri 250 ° C munsi yiswe "ubushyuhe".Kubaka byakozwe hakurikijwe ingamba zimwe zo gutunganya nkubushakashatsi bwavuzwe mu gice kibanziriza iki (Ishusho 1a - 1c).Amashusho ya SEM yerekana topografiya yavuyemo nkuko bigaragara ku gishushanyo 1d - f.Gushyushya icyitegererezo kuri 250 C biganisha ku kwiyongera kugaragara kwa LSFL, icyerekezo cyacyo kijyanye na laser polarisation.Izi nyubako zishobora kurangwa nka LSFL-II kandi zikagira igihe cyumwanya \ (\ Lambda _ \ mathrm {LSFL-II} \) ya 247 ± 35 nm.Ikimenyetso cya LSFL-II ntigaragara muri FFT kubera uburyo bwo hejuru bwo hejuru.Nk \ \ o ( kubirenze inshuro nyinshi.wavenumbers (imirongo yo hasi) hanyuma uhindukire werekeza hagati ya FFT.Imirongo yibyobo mumashusho 1d irashobora kuba intangiriro yibyo bita grooves byakozwe perpendicular kuri LSFL-I22,27.Mubyongeyeho, LSFL-II isa nkaho yabaye ngufi kandi ikozwe muburyo budasanzwe.Menya kandi ko impuzandengo yubunini bugaragara hamwe na nanograin morphologie ni nto muriki kibazo.Byongeye kandi, ingano yikwirakwizwa rya nanoparticles byagaragaye ko idatatanye (cyangwa iganisha kuri agglomeration nkeya) kuruta kudashyuha.Ubwiza, ibi birashobora gusuzumwa ugereranije imibare 1a, d cyangwa b, e, kimwe.
Nkuko guhuzagurika \ (o _ {\ mathrm {p}} \) byiyongereye kugera kuri 99,67% (Igishusho 1f), imiterere y’imiterere itandukanye yagiye igaragara buhoro buhoro kubera imirongo igaragara.Nyamara, utwo dusimba dusa nkutateganijwe kandi ntitwimbitse kuruta ku gishushanyo 1c.Itandukaniro rito hagati yumucyo nu mwijima wibishusho byerekana ubuziranenge.Ibisubizo birashigikirwa kandi nibimenyetso bidakomeye kandi bitatanye byerekana ibimenyetso bya FFT mubishushanyo 1f ugereranije na FFT kuri c.Intambwe nto nazo zagaragaye ku gushyushya iyo ugereranije Ishusho 1b na e, byaje kwemezwa na microscopie conocal.
Usibye ubushakashatsi bwabanjirije iki, polarisiyasi yumurambararo wa lazeri yazengurutswe na 90 \ (^ {\ umuzenguruko} \), ibyo bigatuma icyerekezo cya polarisiyasi kigenda gitambitse kuri platifomu.Ku mutini.2a-c yerekana ibyiciro byambere byo gushinga imiterere, \ (o _ {\ mathrm {p}} \) = 99,0% mubushyuhe (a), bushyushye (b) kandi bushyushye 90 \ (^ {\ umuzenguruko} \) - Urubanza hamwe no kuzunguruka (c).Kugirango ugaragaze nanotopografi yimiterere, uduce twaranzwe na kare kare twerekanwe mubishushanyo.2d, ku gipimo kinini.
SEM amashusho yuburyo bwububiko bwakozwe hakoreshejwe DLIP.Ibipimo byimikorere ni nkibiri mu gishushanyo.1.Ishusho yerekana icyitegererezo cy'ubushyuhe \ (T_s \), polarisiyasi na pulse byuzuye \ (o_ \ mathrm {p} \).Inet yumukara yongeye kwerekana impinduka ijyanye na Fourier.Amashusho muri (d) - (i) ni ugukuza ahantu hagaragaye muri (a) - (c).
Kuri iki kibazo, birashobora kugaragara ko ibyubatswe ahantu hijimye cyane ku gishushanyo cya 2b, c biroroshye polarisiyasi bityo bikaba byanditseho LSFL-II14, 20, 29, 30. Ikigaragara ni uko icyerekezo cya LSFL-I nacyo kizunguruka ( Igishushanyo 2g, i), gishobora kugaragara uhereye ku cyerekezo cyubwoko bwa s muri FFT ihuye.Umuyoboro mugari wa LSFL-I ugaragara nkuwagereranije nigihe b, kandi urwego rwarwo rwerekejwe mugihe gito ku gishushanyo cya 2c, nkuko bigaragazwa nikimenyetso kinini cyubwoko bwa s.Rero, ibihe bya LSFL bikurikira birashobora kugaragara kurugero rwubushyuhe butandukanye: \ (\ Lambda _ {\ mathrm {LSFL-I}} \) = 418 \ (\ pm 65 \) nm kuri 21 ^ {\ umuzenguruko }) C (Igishusho 2a), \ (\ Lambda _ {\ mathrm {LSFL-I}} \) = 445 \ }} \) = 247 ± 35 nm kuri 250 ° C (Igishusho 2b) kugirango s polarisiyasi.Ibinyuranye, igihe cyumwanya wa p-polarisation na 250 \ (^ {\ umuzenguruko} \) C bingana na \ (\ Lambda _ {\ mathrm {LSFL-I)) \) = 390 \ (\ pm 55 \ ) nm na \ (\ Lambda _ {\ mathrm {LSFL-II}} \) = 265 ± 35 nm (Ishusho 2c).
Ikigaragara ni uko ibisubizo byerekana ko nukwongera ubushyuhe bwikitegererezo, morfologiya yo hejuru irashobora guhinduka hagati yintambwe ebyiri, harimo (i) ubuso burimo ibintu bya LSFL-I gusa na (ii) agace kegeranye na LSFL-II.Kuberako ishingwa ryubwoko bwihariye bwa LIPSS hejuru yicyuma rifitanye isano nuburinganire bwa oxyde, hakozwe isesengura X-ray (EDX).Imbonerahamwe 1 yerekana muri make ibisubizo byabonetse.Buri cyemezo gikozwe mugereranije byibuze bine yerekanwe ahantu hatandukanye hejuru yicyitegererezo cyatunganijwe.Ibipimo bikorerwa mubushyuhe butandukanye bw'icyitegererezo \ (T_ \ mathrm {s} \) hamwe n'imyanya itandukanye yubuso bwikitegererezo burimo ahantu hatubatswe cyangwa hubatswe.Ibipimo kandi bikubiyemo amakuru ajyanye n’ibice byimbitse bidafite uburozi biri munsi y’ahantu havuwe, ariko mu burebure bwa electron bwinjira mu isesengura rya EDX.Ariko, twakagombye kumenya ko EDX igarukira mubushobozi bwayo bwo kugereranya ibirimo ogisijeni, bityo indangagaciro hano zishobora gutanga isuzuma ryujuje ubuziranenge.
Ibice bitavuwe by'icyitegererezo ntabwo byagaragaje urugero rwa ogisijeni ku bushyuhe bwo gukora.Nyuma yo kuvura lazeri, urugero rwa ogisijeni rwiyongereye muri byose31.Itandukaniro ryibintu bigize ibice byombi bitavuwe nkuko byari byitezwe ku byuma by’ubucuruzi, kandi agaciro ka karubone kari hejuru cyane ugereranije n’urupapuro rwakozwe n’uruganda rukora ibyuma bya AISI 304 kubera kwanduza hydrocarubone32.
Mbere yo kuganira ku mpamvu zishobora gutuma igabanuka ryimbitse ya groove hamwe ninzibacyuho kuva LSFL-I ujya LSFL-II, ubucucike bwamashanyarazi (PSD) hamwe nuburebure bwakoreshejwe.
. byumvikane nkubwiyongere mubice bihoraho (k \ (\ le \) 0.7 µm \ (^ {- 1} \), ntabwo byerekanwe), ni ukuvuga ubworoherane.(ii) Guhuza bisobanura uburebure bwuburebure.Icyitegererezo cy'ubushyuhe \ (T_s \), guhuzagurika \ (o _ {\ mathrm {p}} \), hamwe na laser polarisation E ugereranije nicyerekezo \ (\ vec {v} \) cyerekezo cya platifomu yerekanwe mubibanza byose.
Kugirango ugereranye ishusho yamashusho ya SEM, impuzandengo isanzwe yingufu zisanzwe zakozwe kuva byibuze amashusho atatu ya SEM kuri buri kintu cyashyizweho muguhuza impuzandengo zose zingana (1D) imbaraga zerekana ibintu (PSDs) muburyo bwa x cyangwa y.Igishushanyo gihuye cyerekanwe ku gishushanyo cya 3i yerekana inshuro zihindagurika yikimenyetso nintererano yacyo ugereranije.
Ku mutini.3ia, c, e, impinga ya DLIP ikura hafi ya \ (k _ {\ mathrm {DLIP}} ~ = ~ 2 \ pi \) (4.5 µm) \ (^ {- 1} \) = 1.4 µm \ (^ {- 1} \) cyangwa guhuza bihuye bihuye nkuko guhuzagurika kwiyongera \ (o _ {\ mathrm {p)) \).Kwiyongera kwa amplitude yibanze byajyanye niterambere rikomeye ryimiterere ya LRIB.Amplitude yo murwego rwohejuru yiyongera hamwe nuburebure bwimisozi.Kubikorwa byurukiramende nko kugabanya imanza, kugereranya bisaba umubare munini wumurongo.Kubwibyo, impinga igera kuri 1.4 µm \ (^ {- 1} \) muri PSD hamwe nuburinganire bujyanye nabyo birashobora gukoreshwa nkibipimo byubuziranenge kumiterere ya groove.
Ibinyuranye, nkuko bigaragara ku gishushanyo cya 3 (i) b, d, f, PSD yicyitegererezo gishyushye yerekana impinga nini kandi nini yagutse ifite ibimenyetso bike mubihuza.Byongeye, mu mutini.3 (i) f yerekana ko ikimenyetso cya kabiri gihuza ndetse kirenze ikimenyetso cyibanze.Ibi birerekana uburyo budasanzwe kandi butagaragara DLIP imiterere yicyitegererezo gishyushye (ugereranije na \ (T_s \) = 21 \ (^ \ umuzenguruko \) C).Ikindi kintu kiranga nuko uko guhuzagurika \ (o _ {\ mathrm {p}} \) byiyongera, ibimenyetso bya LSFL-I bivamo bihinduka yerekeza kuri wavenumber nto (igihe kirekire).Ibi birashobora gusobanurwa nubwiyongere bwimbitse bwimpande zuburyo bwa DLIP hamwe nubwiyongere bwaho bujyanye no kuruhande rwimpanuka14,33.Ukurikije iyi nzira, kwaguka kwa LSFL-I nabyo bishobora gusobanurwa.Usibye ahantu hahanamye, hari kandi ahantu hahanamye hepfo no hejuru yimisozi yimiterere ya DLIP, itanga umwanya munini wibihe bya LSFL-I.Kubikoresho byinjiza cyane, igihe cya LSFL-I gisanzwe kigereranywa nka:
aho \ (\ theta \) ni inguni yibibaho, kandi abiyandikishije s na p bivuga polarizasiyo zitandukanye33.
Twabibutsa ko indege yibasiwe na DLIP isanzwe iba itandukanijwe no kugenda kwa platifomu, nkuko bigaragara ku gishushanyo cya 4 (reba igice cyibikoresho nuburyo).Kubwibyo, s-polarisiyasi, nkitegeko, irasa nigikorwa cyurwego, kandi p-polarisiyasi ni perpendicular kuri yo.Ukurikije ikigereranyo..Ibi biterwa no kwiyongera kwa \ (\ theta \) nu ntera inguni \ (\ theta \ pm \ delta \ theta \) uko ubujyakuzimu bwiyongera.Ibi birashobora kugaragara ugereranije impinga ya LSFL-I ku gishushanyo cya 3ia, c, e.
Ukurikije ibisubizo byerekanwe kumitini.1c, LSFL \ (_ \ mathrm {edge} \) nayo igaragara muri PSD ihuye na fig.3ie.Ku mutini.3ig, h yerekana PSD ya p-polarisiyasi.Itandukaniro muri mpinga ya DLIP rigaragara cyane hagati yubushyuhe kandi budashyushye.Muri iki kibazo, ikimenyetso kiva muri LSFL-I gihuzagurika hamwe n’imiterere ihanitse ya mpinga ya DLIP, ukongeraho ku kimenyetso hafi y’uburebure bw’umuraba.
Kuganira ku bisubizo birambuye, ku gishushanyo cya 3ii yerekana ubujyakuzimu bwubatswe no guhuzagurika hagati yimisemburo ya DLIP umurongo ukwirakwiza mubushyuhe butandukanye.Umwirondoro wuburebure bwuburebure bwubuso bwabonetse mugereranije impuzandengo icumi yuburebure bwa verticale ikikije hagati yimiterere ya DLIP.Kuri buri bushyuhe bwakoreshejwe, ubujyakuzimu bwimiterere bwiyongera hamwe no kwiyongera kwa pulse.Umwirondoro wicyitegererezo gishyushye werekana ibinono bifite impinga-mpinga (pvp) agaciro ka 0.87 µm kuri s-polarisation na 1.06 µm kuri p-polarisiyasi.Ibinyuranyo, s-polarisiyasi na p-polarisiyasi yicyitegererezo kidashyushye cyerekana pvp ya 1,75 µm na 2.33 µm.Pvp ihuye irerekanwa murwego rwo hejuru murwego rwo hejuru.3ii.Impuzandengo ya PvP ibarwa mugereranije ugereranije umunani PvPs.
Byongeye, mu mutini.3iig, h yerekana uburebure bwa p-polarisiyasi ikwirakwizwa perpendicular kuri sisitemu yo guhagarara hamwe na groove igenda.Icyerekezo cya p-polarisiyasi kigira ingaruka nziza mubwimbike bwa groove kuva bivamo pvp hejuru gato kuri 2,33 µm ugereranije na s-polarisiyasi kuri 1.75 µm pvp.Ibi na byo bihuye na grooves no kugenda kwa sisitemu ya sisitemu.Izi ngaruka zishobora guterwa nuburyo buto mugihe cya s-polarisiyasi ugereranije nu p-polarisiyasi (reba Ishusho 2f, h), izaganirwaho cyane mu gice gikurikira.
Intego y'ibiganiro ni ugusobanura kugabanuka k'uburebure bwa groove bitewe n'impinduka mubyiciro nyamukuru bya LIPS (LSFL-I kugeza LSFL-II) mugihe habaye ingero zishyushye.Subiza rero ibibazo bikurikira:
Kugira ngo dusubize ikibazo cya mbere, birakenewe ko dusuzuma uburyo bushinzwe kugabanya kugabanuka.Kuri pulse imwe mugihe gisanzwe, ubujyakuzimu bushobora gusobanurwa nka:
aho \ (\ delta _ {\ mathrm {E}} \) nuburebure bwimbaraga zinjira, \ (\ Phi \) na \ (\ Phi _ {\ mathrm {th}} \) ni ibicurane byinjira hamwe na Ablation imbibi, uko bikurikirana34.
Imibare, ubujyakuzimu bwimbaraga zinjira zigira ingaruka nyinshi mubwimbitse bwo gukuraho, mugihe ihinduka ryingufu rifite ingaruka ya logarithmic.Guhindura ibicurane rero ntabwo bigira ingaruka \ (\ Delta z \) mugihe cyose \ (\ Phi ~ \ gg ~ \ Phi _ {\ mathrm {th}} \).Nyamara, okiside ikomeye (nk'urugero, bitewe no gukora chromium oxyde) itera imiyoboro ikomeye ya Cr-O35 ugereranije n’imigozi ya Cr-Cr, bityo ikongera umubare w’imisoro.Kubera iyo mpamvu, \ (\ Phi ~ \ gg ~ \ Phi _ {\ mathrm {th}} \) ntagihaze, ibyo bigatuma igabanuka ryihuse ryimbitse hamwe no kugabanuka kwingufu zingufu.Byongeye kandi, isano iri hagati ya okiside nigihe cya LSFL-II irazwi, ishobora gusobanurwa nimpinduka za nanostructure ubwayo hamwe nuburyo bwiza bwa optique bwubuso buterwa na okiside yubuso 30,35.Kubwibyo, ubuso nyabwo bwo gukwirakwiza ibicurane byinjira \ (\ Phi \) biterwa ningaruka zikomeye zimikoranire hagati yigihe cyimiterere nubunini bwurwego rwa oxyde.Ukurikije ibihe, nanostructure igira uruhare runini mu gukwirakwiza ingufu zinjiye zatewe no kwiyongera gukabije mu murima, gushimishwa na plasimoni zo hejuru, guhererekanya urumuri rudasanzwe cyangwa gutatanya 17,19,20,21.Kubwibyo, ( ^ {-1} \ hafi \ delta _ {\ mathrm {E}} ^ {- 1} \) kubijwi byose byegeranye.Kubera ko umubyimba wa firime ya oxyde ahanini biterwa nigihe cyo gukomera [26], ingaruka zizina ziterwa nubushyuhe bwikitegererezo.Micrografi ya optique yerekanwe mubishusho S1 mubikoresho byinyongera byerekana impinduka mumiterere ya optique.
Izi ngaruka zisobanura igice cyimbitse zubujyakuzimu mubijyanye nuburinganire buto mubishushanyo 1d, e na 2b, c na 3 (ii) b, d, f.
LSFL-II izwiho gukora kuri semiconductor, dielectrics, nibikoresho bikunda okiside 14,29,30,36,37.Mugihe cyanyuma, ubunini bwubuso bwa okiside yubuso ni ngombwa cyane30.Isesengura rya EDX ryakozwe ryagaragaje imiterere ya oxyde yo hejuru hejuru yububiko.Rero, kuburugero rudashyushye, umwuka wa ogisijeni usa nkaho ugira uruhare mukurema igice cyimyuka ya gaze hamwe nigice cyo gukora oxyde yo hejuru.Ibi bintu byombi bigira uruhare runini muriki gikorwa.Ibinyuranye, kuburugero rushyushye, okiside yicyuma ya okiside itandukanye (SiO \ (_ {\ mathrm {2}} \), Cr \ (_ {\ mathrm {n}} \) O \ (_ {\ mathrm { m}} \), Fe \ (_ {\ mathrm {n}} \) O \ (_ {\ mathrm {m}} \), NiO, nibindi) biragaragara 38 bashyigikiye.Usibye ibice bisabwa bya okiside, kuba hari uburebure bwa subwavelength, cyane cyane umwanya munini wa LIPSS (HSFL), birakenewe kugirango habeho ubukana bwa subwavelength (d-type) ubukana 14,30.Uburyo bwanyuma bwa LSFL-II nuburyo bwimikorere ya HSFL amplitude hamwe nubunini bwa oxyde.Impamvu yubu buryo ni intera ndende yumucyo ukwirakwizwa na HSFL numucyo wagabanutse mubikoresho kandi bigakwirakwizwa imbere mubikoresho bya dielectric 20,29,30.SEM amashusho yuruhande rwubuso bwishusho mubishusho S2 mubice byinyongera byerekana HSFL yabanjirije.Aka karere ko hanze karagerwaho cyane na peripheri yo gukwirakwiza ubukana, butuma hashingwa HSFL.Bitewe nuburinganire bwikwirakwizwa, iyi ngaruka nayo ibera kumurongo wo gusikana.
Ubushyuhe bw'icyitegererezo bugira ingaruka kuri LSFL-II muburyo butandukanye.Ku ruhande rumwe, kwiyongera k'ubushyuhe bw'icyitegererezo \ (T_ \ mathrm {s} \) bigira ingaruka nini cyane ku kigero cyo gukomera no gukonja kuruta ubunini bw'urwego rwashongeshejwe26.Rero, ibice byamazi byurugero rushyushye bihura na ogisijeni yibidukikije mugihe kirekire.Byongeye kandi, gutinda gukomera bituma habaho iterambere ryimikorere ya convective yongerera kuvanga ogisijeni na okiside hamwe nicyuma cyamazi26.Ibi birashobora kugaragazwa no kugereranya ubunini bwurwego rwa oxyde yakozwe no gukwirakwizwa gusa (\ (\ Lambda _ \ mathrm {diff} = \ sqrt {D ~ \ inshuro ~ t_ \ mathrm {s}} ~ \ le ~ 15 \) nm) Igihe coagulation ijyanye ni \ (t_ \ mathrm {s} ~ \ le ~ 200 \) ns, hamwe na coefficient de diffuzione \ (D ~ \ le \) 10 \ (^ {- 5} \) cm \ (^ 2 \) / s) Uburebure buringaniye bwagaragaye cyangwa busabwa muburyo bwa LSFL-II30.Kurundi ruhande, gushyushya nabyo bigira ingaruka kumiterere ya HSFL bityo ibintu byo gutatanya bisabwa kugirango bihinduke muburyo bwa LSFL-II d.Kugaragara kwa nanovoide yafatiwe munsi yubutaka byerekana uruhare rwabo mugushinga HSFL39.Izi nenge zirashobora kwerekana inkomoko ya electromagnetic ya HSFL bitewe nuburyo bukenewe bwigihe kinini cyigihe cyigihe 14,17,19,29.Mubyongeyeho, ubwo buryo bwo kubyara ubukana burasa cyane hamwe numubare munini wa nanovoids19.Rero, impamvu yo kwiyongera kwa HSFL irashobora gusobanurwa nimpinduka zingaruka zinenge za kristu nkuko \ (T_ \ mathrm {s} \) yiyongera.
Vuba aha byerekanwe ko igipimo cyo gukonjesha cya silikoni ari ikintu cyingenzi kigizwe na supersaturation interinsic interstinal interstitial bityo rero kugirango habeho gukusanya inenge hamwe no gushiraho dislokasiyo40,41.Imikorere ya molekulari yigana ibyuma byera yerekanye ko imyanya irenze urugero mugihe cyo kongera kwisubiramo, bityo rero gukusanya imyanya mubyuma biva muburyo busa 42,43,44.Byongeye kandi, ubushakashatsi buherutse gukorwa kuri feza bwibanze ku buryo bwo gukora ubusa n’amatsinda bitewe no kwegeranya inenge 45.Kubwibyo, kwiyongera k'ubushyuhe bw'icyitegererezo \ (T_ \ mathrm {s} \), bityo, kugabanuka kw'igipimo cyo gukonja birashobora kugira ingaruka ku miterere yubusa, aribwo nuclei ya HSFL.
Niba imyanya ari ngombwa ibanziriza imyenge bityo HSFL, ubushyuhe bw'icyitegererezo \ (T_s \) bugomba kugira ingaruka ebyiri.Ku ruhande rumwe, \ (T_s \) bigira ingaruka ku gipimo cyo kongera kwisubiramo, bityo rero, kwibanda ku nenge z'ingingo (kwibanda ku myanya) muri kristu ikuze.Ku rundi ruhande, bigira ingaruka no ku gipimo cyo gukonja nyuma yo gukomera, bityo bikagira ingaruka ku ikwirakwizwa ry’inenge ziri muri kristu 40,41.Mubyongeyeho, igipimo cyo gukomera giterwa na kristu yerekana icyerekezo bityo ikaba anisotropique cyane, kimwe no gukwirakwiza inenge 42,43.Ukurikije iyi ngingo, kubera igisubizo cya anisotropique cyibintu, imikoranire yumucyo nibintu ihinduka anisotropique, ari nako byongerera imbaraga irekurwa ryigihe gito.Kubikoresho bya polycristaline, iyi myitwarire irashobora kugarukira kubunini bw'ingano imwe.Mubyukuri, imiterere ya LIPSS yerekanwe bitewe nicyerekezo cy'ingano 46,47.Kubwibyo, ingaruka zubushyuhe bwikitegererezo \ (T_s \) ku gipimo cyo korohereza ibintu ntizishobora gukomera nkingaruka zo kwerekana intete.Rero, icyerekezo gitandukanye cya kristu yerekana ibinyampeke bitandukanye itanga ibisobanuro byokwiyongera kubusa no kwegeranya HSFL cyangwa LSFL-II.
Kugirango usobanure ibimenyetso byambere byiyi hypothesis, ingero mbisi zashizweho kugirango hagaragazwe ingano zegeranye n'ubuso.Kugereranya ibinyampeke mu mbuto.S3 irerekanwa mubikoresho byiyongera.Mubyongeyeho, LSFL-I na LSFL-II bagaragaye mumatsinda kurugero rushyushye.Ingano na geometrie yaya matsinda bihuye nubunini bwingano.
Byongeye kandi, HSFL iboneka gusa murwego ruto ku bucucike buke bitewe ninkomoko yabyo 19,29,48.Kubwibyo, mubigeragezo, birashoboka ko bibaho gusa kuri peripheri yumwirondoro.Kubwibyo, HSFL yashizweho hejuru yubusa cyangwa okiside nkeya, byagaragaye mugihe ugereranije uduce twa oxyde yingero zavuwe kandi zitavuwe (reba imbonerahamwe reftab: urugero).Ibi biremeza ko igitekerezo cya oxyde iterwa ahanini na laser.
Urebye ko imiterere ya LIPSS iterwa ahanini numubare wimpiswi bitewe nigitekerezo cyo guhuza ibitekerezo, HSFLs irashobora gusimburwa nuburyo bunini uko impiswi ziyongera19.HSFL isanzwe isanzwe itanga imbaraga zidasanzwe zisanzwe (d-mode) zisabwa kugirango hashyizweho LSFL-II.Kubwibyo, uko guhuzagurika kwa \ (o_ \ mathrm {p} \) kwiyongera (reba Ishusho 1 kuva de), ubudahangarwa bwa LSFL-II buragabanuka.
Ubu bushakashatsi bwakoze ubushakashatsi ku ngaruka z'ubushyuhe bwa substrate kuri morfologiya yo hejuru ya laser yubatswe DLIP ivura ibyuma bitagira umwanda.Byagaragaye ko gushyushya substrate kuva kuri 21 kugeza kuri 250 ° C biganisha ku kugabanuka kwubujyakuzimu kuva kuri 1.75 kugeza 0.87 µm muri s-polarisation no kuva kuri 2.33 kugeza 1.06 µm muri p-polarisiyasi.Uku kugabanuka guterwa nimpinduka zubwoko bwa LIPSS kuva LSFL-I kugeza LSFL-II, ifitanye isano na laser-iterwa na oxyde ya oxyde hejuru yubushyuhe bwo hejuru.Byongeye kandi, LSFL-II irashobora kongera umuvuduko urenze bitewe na okiside yiyongera.Bikekwa ko muri ubu buryo bwa tekinoloji hamwe no guhuzagurika kwinshi, impuzandengo y’ingufu zingana n’ikigereranyo cyo gusubiramo, kuba LSFL-II nayo igenwa n’imihindagurikire y’imikorere ya dislokisiyo iterwa no gushyushya icyitegererezo.Igiteranyo cya LSFL-II kiravugwa ko biterwa no gushingira ku ngano zishingiye ku nanovoid, biganisha kuri HSFL nk'ibibanziriza LSFL-II.Mubyongeyeho, ingaruka zicyerekezo cya polarisiyasi mugihe cyimiterere nubunini bwigihe cyimiterere irigwa.Biragaragara ko p-polarisiyasi ikora neza kubikorwa bya DLIP muburyo bwimbitse.Muri rusange, ubu bushakashatsi buvumbuye urutonde rwibikorwa byo kugenzura no kunoza ubujyakuzimu bwa DLIP kugirango habeho ubuso bwihariye.Hanyuma, inzibacyuho kuva LSFL-I yerekeza LSFL-II iterwa n'ubushyuhe rwose kandi kwiyongera gake kugipimo gisubirwamo biteganijwe ko impiswi ihora ihindagurika kubera kwiyongera k'ubushyuhe24.Izi ngingo zose zirahuye nibibazo biri imbere byo kwagura inzira ya DLIP, kurugero binyuze mugukoresha sisitemu yo gusikana polygonal 49.Kugabanya ubushyuhe bwiyongera, ingamba zikurikira zirashobora gukurikizwa: komeza umuvuduko wo gusikana wa skaneri ya polygonal hejuru cyane ishoboka, ukoresheje ubunini bunini bwa laser, ubunini bwa orthogonal ugana icyerekezo, kandi ukoresheje uburyo bwiza bwo gukuraho.fluence 28. Mubyongeyeho, ibi bitekerezo byemerera gushiraho topografiya igoye ya topografiya kugirango igere hejuru yimikorere ikoresheje DLIP.
Muri ubu bushakashatsi, hakoreshejwe ibyuma byerekana amashanyarazi (X5CrNi18-10, 1.4301, AISI 304) 0.8 mm z'ubugari.Kugira ngo ukureho umwanda wose hejuru, ingero zogejwe neza na Ethanol mbere yo kuvura lazeri (kwibumbira hamwe kwa Ethanol \ (\ ge \) 99,9%).
Igenamiterere rya DLIP ryerekanwe ku gishushanyo cya 4. Ingero zubatswe hakoreshejwe sisitemu ya DLIP ifite ibikoresho bya 12 ps ultrashort pulsed laser isoko ifite uburebure bwa 532 nm nigipimo ntarengwa cyo gusubiramo 50 MHz.Ikwirakwizwa ryingufu za beam ni Gaussian.Ibikoresho byabugenewe byabugenewe bitanga ibice bibiri-bigizwe na interferometriki kugirango habeho umurongo ugereranije.Lens ifite uburebure bwa mm 100 irenga imirishyo ibiri yinyongera ya lazeri hejuru yuburinganire bwa 6.8 \ (^ \ umuzenguruko \), itanga igihe cyumwanya kingana na 4.5 µm.Ibisobanuro byinshi kubijyanye nubushakashatsi ushobora kubisanga ahandi50.
Mbere yo gutunganya lazeri, icyitegererezo gishyirwa ku isahani yo gushyushya ubushyuhe runaka.Ubushyuhe bw'isahani yo gushyushya bwashyizwe kuri 21 na 250 ° C.Mu bushakashatsi bwose, indege ihinduranya umwuka wafunzwe yakoreshejwe ifatanije nigikoresho gisohora kugirango hirindwe umukungugu kuri optique.Sisitemu ya x, y yashyizweho kugirango ihagarare icyitegererezo mugihe cyubaka.
Umuvuduko wa sisitemu yo guhagararaho yari itandukanye kuva kuri 66 kugeza kuri 200 mm / s kugirango ubone guhuzagurika hagati ya pulses ya 99.0 kugeza 99.67 \ (\% \).Muri byose, igipimo cyo gusubiramo cyashyizwe kuri 200 kHz, naho impuzandengo ya 4 W, itanga ingufu kuri pulse ya 20 μJ.Diameter ya beam ikoreshwa mubushakashatsi bwa DLIP igera kuri 100 µm, kandi ingufu za laser zikomoka kuri 0.5 J / cm \ (^ {2} \).Ingufu zose zasohotse kuri buri gace ni impumyi yibihuru ihwanye na 50 J / cm \ (^ 2 \) kuri \ (o _ {\ mathrm {p}} \) = 99.0 \ (\% \), 100 J / cm \ (^ 2 \) kuri \ (o _ {\ mathrm {p)) \) = 99.5 \ (\% \) na 150 J / cm \ (^ 2 \) kuri \ (o_ {\ mathrm {p}} \ ) = 99.67 \ (\% \).Koresha isahani ya \ (\ lambda \) / 2 kugirango uhindure polarisiyasi ya laser.Kuri buri cyiciro cyibipimo byakoreshejwe, ubuso bungana na 35 × 5 mm \ (^ {2} \) byanditse kuri sample.Ubushakashatsi bwose bwubatswe bwakozwe mubihe bidukikije kugirango inganda zikorwe.
Imiterere ya morphologie yasuzumwe hifashishijwe microscope ya conocal ifite ubunini bwa 50x hamwe na optique na vertical verisiyo ya 170 nm na 3 nm.Ikusanyamakuru ryakusanyirijwe hamwe ryasuzumwe hifashishijwe porogaramu yo gusesengura hejuru.Kuramo imyirondoro mumibare yubutaka ukurikije ISO 1661051.
Izi ngero zaranzwe no gukoresha microscope ya elegitoronike kuri voltage yihuta ya 6.0 kV.Imiterere yimiti yubuso bwintangarugero yasuzumwe hifashishijwe ingufu zikwirakwiza X-ray spectroscopy (EDS) kumugozi wihuta wa 15 kV.Byongeye kandi, microscope optique ifite intego ya 50x yakoreshejwe kugirango hamenyekane imiterere ya granulaire ya microstructure ya sample. Mbere yibyo, ibyitegererezo byashizwe ku bushyuhe buhoraho bwa 50 \ (^ \ umuzenguruko \) C mu minota itanu mu cyuma kitagira ingese hamwe na aside hydrochloric na aside nitricike ya 15-20 \ (\% \) na 1 \ ( - <\) 5 \ (\% \), uko bikurikirana. Mbere yibyo, ibyitegererezo byashizwe ku bushyuhe buhoraho bwa 50 \ (^ \ umuzenguruko \) C mu minota itanu mu cyuma kitagira ingese hamwe na aside hydrochloric na aside nitricike ya 15-20 \ (\% \) na 1 \ ( - <\) 5 \ (\% \), uko bikurikirana. Перед этим обрцы Травили при постоянной мае 50 \ (^ \ umuzenguruko) \% \) соответственно. Mbere yibyo, ibyitegererezo byashizwe ku bushyuhe buhoraho bwa 50 \ (circ \ umuzenguruko \) C mu minota itanu mu irangi ryicyuma ridafite ingese hamwe na acide hydrochloric na nitric hamwe na 15-20 \ (\% \) na 1 \ ( - <\) 5 \ (\% \) uko bikurikirana.在 此 之前 ， 样品 在 不锈钢 染色液 中 以 50 \ (^ \ umuzenguruko \) C 的 恒温 蚀刻 五 分钟 ， 盐酸 和 硝酸 浓度 为 15–20 \ (\% \) 和 1 \ (- <\) 5 \ (\% \) ， 分别。在 此 之前 ， 样品 在 不锈钢 染色液 以 以 50 \ (^ \ umuzenguruko \) C (\% \) ， 分别。Mbere yibyo, ibyitegererezo byatoraguwe mu minota itanu ku bushyuhe buhoraho bwa 50 \ (^ \ umuzenguruko \) C mu gisubizo cyangiza ibyuma bitagira umwanda hamwe na acide hydrochloric na nitric 15-20 \ (\% \) na 1 \.(- <\) 5 \ (\% \) соответственно. (- <\) 5 \ (\% \) uko bikurikirana.
Igishushanyo mbonera cyibishushanyo mbonera byubushakashatsi bubiri bwa DLIP, harimo (1) urumuri rwa lazeri, (2) isahani ya \ (\ lambda \) / 2, (3) umutwe wa DLIP ufite iboneza rya optique, (4 ) isahani ishyushye, (5) cross-fluidic, (6) x, y intambwe yerekana na (7) ingero zicyuma.Ibiti bibiri birengeje urugero, bizengurutse umutuku ibumoso, birema umurongo ugaragara kuri sample kuri \ (2 \ theta \) (harimo s- na p-polarisiyasi).
Imibare ikoreshwa kandi / cyangwa yasesenguwe mubyigisho byubu iraboneka kubanditsi babisabwe babisabye.
Igihe cyo kohereza: Mutarama-07-2023